Undergraduate Courses

Integrated Circuit Fabrication Processes (30260072)

Instructor: Tang Jianshi

Integration density and performance of digital and analog integrated circuits have undergone an astounding revolution in the last few decades. Although innovative circuit and system design can account for some of these performance increases, technology has been the main driving force. This course will examine the basic micro fabrication process technologies that have enabled the integrated circuit revolution and investigate newer technologies. The goal is to first impart a working knowledge of the methods and processes by which micro and nano devices are constructed, and then teach approaches for combining such methods into process sequences that yield arbitrary devices. Although the emphasis in this course is on transistor devices, many of the methods to be taught are also applicable to MEMS and other micro-devices. This course is designed for students interested in the physical bases and practical methods of silicon VLSI chip fabrication, or the impact of technology on device and circuit design.

Micro/Nano Fabrication Experiments (40260251)

Instructor: Wu Xiaoming

This course provides students with clean room job opportunity to learn about microfabrication processes. In this course, Students will learn to use many kinds of advanced equipment, and finish the complete processes of many electronic devices, including MOSFETs, PN junctions, implant resistors and capacitors. The main processing steps consists of lithography, dry etching, wet etching, thermal oxidation, PECVD, sputtering, implantation. The course also includes processing inspection and device performance testing.

Foundations of Integrated Circuit (1) (30260143)

Instructor: Wu Xingjun

Signals and Systems (30260153)

Instructor: Jiang Hanjun

1.Time domain characterization of signals and systems, including the description of continuous-time and discrete-time signals and systems, the time domain properties of continuous/discrete linear time-invariant systems, and the time domain system response analysis based on the time-domain differential equation.

2.Frequency domain characterization of continuous-time signals, including the Fourier series representation of periodical signals, the Fourier Transform of continuous-time signals, the Laplace Transform of continuous-time signals, system functions of linear time-invariant systems.

3.Frequency domain characterization of discrete-time signals, including the sampling Theorem, the Fourier Transform of discrete-time signals, the z Transform of discrete-time signals, the description of discrete-time system in z domain.

4.Linear time-invariant system analysis, including the frequency response of continuous/discrete-time linear time-invariant systems, feedback control and stability analysis, and the analysis on the typical circuits and systems.

Foundations of Integrated Circuit (2) (30260193)

Instructor: Chi Baoyong

The content of the course is in line with the similar courses in famous oversea universities, and is set according to the circuit foundation and characteristics of the Tsinghua students. This course focuses on integrated amplifiers and teaches the analysis and design methods of the basic blocks of analog integrated circuits, enabling students to initially have the ability to perform analog integrated circuit analysis and design, and to develop students' initial experience in analog integrated circuit design.

Semiconductor Physics and Devices (1) ——Basic Principle (30260184)

Instructor: Wang Yan

This course is one of the compulsory major courses, and it is also a basic course of integrated circuit design and microelectronics technology. Through the study of this course, the students will master the basic principles of semiconductor physics, semiconductor devices. In the following study of integrated circuit principles, CMOS analog integrated circuit design and other courses.

IC Fundamental Laboratory (30260172)

Instructor: Zhang Li

This course is composed of lab skill training and 6 experiments. The lab skill training part covers the basic knowledge and skill teaching and exercise required for this laboratory course, including FPGA, Verilog based digital circuit design and PCB circuit design. The 6 experiments are divided into 3 sections. Section I focuses on the digital IC test and application, including the fundamental logic circuit test (Lab 1), digital circuit design using basic logic gates (Lab 2), introduction and practice of Verilog HDL (Lab 3) and digital circuit design using FPGA (Lab 4). Section II focuses on the analog IC test and application, including the operational amplifier IC test (Lab 5) and analog application circuit design (Lab 6). Section III focuses on the a complicated mixed-signal system design, and the students are expected to complete the design of gesture recognition (Lab 7).

Computer Organization and Design (40260233)

Instructor: Yin Shouyi

This course targets undergraduates of Department of Micro-/Nano-Electronics. It offers a complete treatment of essential issues in designing a computer system. The lectures cover such topics as history of computers, instruction set design, computer performance evaluation, arithmetic circuits, control and data path design, memory hierarchy, and multi-core parallel microprocessors. Students have opportunity to design a simplified microprocessor with a 5-stage pipeline.

Introduction to Nanoelectronics (40260112)

Instructor: Ren Tianling

The development of traditional Si-based microelectronics technology will meet the theoretical physical limit in the near future. How to develop the electronic devices and systems at nanoscale has been the most essential factor for people in academic community and industry of electronic science and technology. Nanoelectronics is a science in regard to the electronic devices and systems at nanoscale. It mainly focuses on the novel theory, effect, method and technology of electronic devices and systems when the feature size reaches nanometers. Nanoelectronics is the leading edge and inevitable trend of development of microelectronics and electronic science and technology. We aim to broaden the horizon of students who attend this curriculum, and help them to deeply understand the recent development and future trend. In this course, we will introduce the basic concept, original physical effect and novel technology in Nanoelectronics. The integration of electronics devices, process technology and design will be explained. The newest developments of Nanoelectronics will be introduced.

Lab. Work of Microelectronics and Nanoelectronics A (40260141)

Instructor: Zhang Li

1) IC testing (including functions, and various DC parameter testing)

2) computer simulation experiment, including IC process simulation, device simulation, Spice model parameter extraction and so on

3) semiconductor device experiment: three kinds of I-V characteristics of MOSFET are measured: threshold voltage VT, bias modulation factor (body factor) gamma, subthreshold slope, carrier mobility of reverse layer

Lab. Work of Microelectronics and Nanoelectronics B (40260151)

Instructor: Zhang Li

There are several experiments in this course: 

1.semiconductor physics experiment

1) measurement of high frequency C-V characteristics of MOS (calculation of fixed charge and movable charge in silicon dioxide)

2) Holzer effect experiment

2.nano electronic teaching experiment

Professional Practice (40260185)

Social practice is an important part of practical teaching, and a critical pathway to improve the comprehensive quality, innovation intention, and practical capability of undergraduate students. The purpose is to enable students to get access to the social practice, acquire knowledge of the social society and production technologies. The students should be able to link the theoretical knowledge to the social practice, and acquire knowledge and basic training of engineering technologies, so as to improve the capabilities of practical working and professional skills.

Diploma Project (Thesis) (40260130)

Diploma project is important for undergraduate student to train the ability of solving the practical problems, and to cultivate innovative consciousness and innovation ability. This course requires student to complete a research project or the corresponding comprehensive training task under the guidance of teachers, and complete the Bachelor's degree thesis independently.

Digital Integrated Circuit and System (30260203)

Instructor: Wu Xingjun

Analog Integrated Circuits and Systems (40260313)

Instructor: Wang Ziqiang

The course mainly focuses on four kinds of practical analog integrated systems: complex operational amplifiers, analog filters (continuous and discrete time), data converters (Nyquist rate and oversampling) and power converters. It focuses on the mathematical principles of circuit networks and key functional module implementation technology.

Semiconductor Physics and Devices (2) (40260302)

Instructor: Gao Bin

MEMS and Microsystems (30260032)

Instructor: Wang Zheyao

Microsystems or MEMS is a multi-disciplinary area that combines physics, mechanics, electrical knowledge. It is a key technology for information acquisition, internet of things, artificial intelligence. This course gives essential knowledge for MEMS, including physical principles, fabrication technologies, typical devices, etc, and application areas such as sensors, RF, optical and biomedical are introduced.

Laboratory for MEMS (40260282)

Instructor: Wang Zheyao

MEMS and microsystems are a practice-oriented area that most of key knowledge can be commanded by students through only practical experiments. This course provide training on hands-on skills for MEMS and microfabrication technologies, including photo lithography, reactive ion etching, chemical vapor deposition, wafer bonding, and deep silicon etching. By combining these technologies, students design and fabricate a practical device for operation, such as micro pressure sensors or micro actuators.

Digital Signal Processing (40260243)

Instructor: Xie Xiang

This course systematically introduces the basic theory (time domain analysis, frequency domain analysis, sampling theorem, spectrum estimation theory, etc.), basic knowledge and basic methods (such as digital analysis methods about discrete-time signal and system, filter design, fast algorithm, etc.) of digital signal processing. This course also combines the characteristics of microelectronics, and is closely related to practical problems of digital signal processing in integrated circuit design. Based on the theoretical content of MIT digital signal processing courses, this course divides the theoretical content into two parts, basic theory and applied theory. And we respectively arrange different circuit analysis and design content for those two parts. For basic theory, integrated circuit analysis which is related to this course is added. For example, in the chapter of sampling theory, the ADC circuit and its principles are introduced, and the circuit structures of a variety of filters related to sampling theory are also given, including the structure of CIC filter which is commonly used in industry. For the part of applied theory, such as FFT and the structure, analysis, design of filters, the content is mainly about analysis and design of digital circuits which are closely connected with practical applications. Industry experts in the field of digital signal processing and chip design will be invited to communicate face-to-face with students to strengthen their understanding about this course.

Digital Signal Processing Experiment (40260341)

Instructor: Xie Xiang

This course includes the following parts: 1) The introduction of the software and hardware platform for digital signal process including DSP (processor), ARM, FPGA, MATLAB and C language. 2)Discrete-time signals and systems, such as how to generate all kinds of sequence signal, how to analyze them pass through system in time and frequency domains. 3)Sampling of continuous-times signal and its reconstruction. This experiment part contains sampling of one- and two-dimensional signals, their reconstruction, time and frequency analysis and super-resolution process. 4)IIR filter design and analysis. 5) One- and two-dimensional filters design and analysis. 6) DFT and FFT algorithms and their hardware designs, analysis of real image noises and its denoising filter design, and an optional experiment for image denoising using the deep learning method. In each experiment, the students need to make using of their basic theoretical knowledge to design and implement a lab by themselves. Some real engineering problems are also included in these experiments.

Very Large-Scale Integrated Circuit CAD (40260043)

Instructor: He Hu

The course selects a set of core EDA topics which provides an essential, fundamental understanding of EDA tasks and the design process. These topics range from the basics of complementary metal oxide semiconductor design to key algorithms used in EDA. Also covered are various modeling and synthesis techniques at the system, register-transfer, and routing etc. It also includes key topics on functional verification and testing topics.

Project on Integrated Circuits Design (40260063)

Instructors: Li Xiangyu, Deng Wei

Introduction to CMOS process flow. Fabrication sequence and device structures in typical CMOS processes. Knowledge of Full-custom design flow. Design input and spice simulation. Layout edit and verification. Layout parameter extraction and post simulation. Knowledge of cell-based design flow. Verilog HDL and coding for synthesis. Simulation, synthesis and P&R. Cell-based verification. The course project of designing a 10-bit cyclic analog-to-digital converter.

Communication Systems and Circuits (40260223)

Instructor: Rhee Woogeun

This course gives insights into analog/digital communication systems with practical circuit design examples. Students are expected to learn both system and circuit design perspectives in modern communication IC design.

Packaging Technology for Integrated Circuits (40260322)

Instructors: Wang Qian

Help students understand the fundamentals of IC packaging.

Advanced Microelectronics Process Integration (30260212)

The integrated circuit (IC) industry is driven by process technology development. This course will introduce and discuss sub-10nm process technology, including key modules such as etch, lithography, etc. The advanced logic technology, memory technology and their integration process will be discussed. Students will have the opportunity to visit the advanced foundry and have hands on practice, discussion with fab engineers. Also, students will learn the simulation tool to have better understand the advanced process. At the end, students are required to work with industry advisor to finish simulation on either logic process or memory process.

Introduction to Quantum Information Science (40260012)

Instructor: Liu Yuxi

Quantum information is a new interdisciplinary field, in which all manner of operations on information, e.g., encoding, communicating and manipulation, can be interpreted using fundamental principles of quantum mechanics. In this course, we will systematically introduce main ideas and fundamental methods of quantum information. On the one hand, we will provide the background knowledge of quantum mechanics, linear algebra, and computer science necessary for understanding quantum information, on the other hand, with thorough study, students can understand and grasp fundamental tools and results of this exciting field. There are six chapters in this course. In the first chapter, we will outline the fundamental concepts and historic development of quantum information science. In the second chapter, we will briefly introduce main concepts of quantum mechanics, linear algebra and computer science, necessary for understanding the quantum information and computation. In the third chapter, we will describe the fundamental elements and elementary operations for performing quantum computation. In fourth chapter, we will explain the quantum algorithms, e.g., quantum Fourier transform. and explain how to solve the problem of factoring and discrete logarithm using the quantum Fourier transform, and further explain the importance of these results to cryptography. In the fifth chapter, we will explain the general principles and criteria for physical implementation of the quantum computation, several examples are given. Finally in the sixth Chapter, we will show you recent achievements in quantum information.

Introduction to Quantum Information Science (40260262)

Instructor: Chen Wei

This course will introduce the main ideas and techniques of the field of quantum computation and quantum information. One will learn the background material in computer science, mathematics and physics necessary to understand quantum computation and information. Latest progress in quantum information process will be introduced and discussed as well.

Integrated Sensors (40260092)

Instructor: Wu Xiaoming

The Characterization of Micro & Nano-electric Materials and Devices (40260162)

Instructor: Xie Dan

Specialty-reading in English (40260082)

Instructor: Li Tiefu

The aim of this course (English for microelectronics) is to improve the abilities of students in reading, translating and writing related to microelectronics and integration circuits. In this course, original foreign text book and some related materials, both of which are in English, are mainly chosen as the teaching materials. Moreover, representative papers selected from various journals for reading and writing, supplementary materials (including Video and Seminar) for listening, and presentation training are also specially provided.

Experimental Techniques and Progress of Nano-technology (40260272)

Instructor: Li Tiefu

In this course, we will talk about some fundamental and practical techniques in nanotechnology, such as quantum computing, nano-electronics, quantum control technology and so on. It will cover vacuum technology, cryogenic physics, nano-fabrication and micro-machinery. We will have chance to visit some real research labs and learn the principles with real research equipment.

Graphene and Two-dimensional Nanoelectronic Technology (00260102)

Instructor: Yang Yi

Graphene and two-dimensional nanoelectronic technology are one of the hot research fields in recent years, research in this area led to the comprehensive development of new materials, new processes, new methods and new technologies, and had a revolutionary impact in the field of information science and technology and social development. This course systematically summarizes recent progress and important achievement of graphene and other two-dimensional materials. Course contents include: discovery of two-dimensional materials, structure, properties and characterization methods; preparation and fabrication of two-dimensional materials; as well as the related application fields, such as integrated circuit technology, optical technology, new energy, bio-medicine, environmental technology, and intelligent sensing.

Fundamentals of Electronics (30260222)

Instructor: Zhang Lei

This course is an introduction course for electronics and circuits, the content is consisting of two major parts, principles of electric circuits and electronic circuits. The first part will introduce basics of electric circuits, circuits analysis methods, sinusoidal steady-state circuits, and dynamic circuits, and second part will cover fundamentals of integrated circuits, operational amplifiers and applications, feedback circuits, and analog-to- digital and digital-to-analog converters etc. Based on the study of this course, the students will be able to construct basic concepts of electric circuits, master the basic principles of electric circuits, circuit analysis methods, basic common circuit building blocks, basics of EDA tools etc., evolve into engineering practices, and prepare necessary knowledges for the following courses.

The Invention of Transistors and the Birth of Information Age (00260011)

Instructor: Wang Zhihua

The invention of the transistor is the most important scientific and technological progress of the twentieth century. Integrated circuit with the transistor core being its core component has become the infrastructure of modern information society, and is playing unparalleled role for the progress of society. The invention of the transistor, derived from the rapidly mature of physics, electronics, and related technology science in late 19th century and early 20th century. The invention of the transistor created a large number of great physicists and engineers, and also produced a number of well-known research institutions and important companies, such as Bell Labs, Fairchild, Intel which are closely related to the invention of the transistor. As a major event in the history of modern science and technology, this invention has become an important experience and lesson in the history of modern science and technology. It involves many aspects such as scientific research management, talent and scientific methods, which can provide important reference and inspiration from the two aspects of success and failure. This course attempts to explore the technological revolution and the direction of innovation from the invention of the transistor to the information society, and to establish the correct view of the students for the scientific research in their future. The course includes the importance of scientific foresight and accurate topic selection, the method of scientific research, the policy of letting go, the knowledge of good people and the rational allocation of professional talents.

Introduction to Solid-state Quantum Computing and Quantum Coherence Devices (00260092)

Instructor: Liu Yuxi

As interdisciplinary studies of quantum mechanics and information science, the quantum information science is a new subject, which has been developed significantly for over 20 years. The most spectacular discovery in quantum information processing is that quantum computers can do things, which are not tractable in classical computers. For example, if we have quantum computer, we can use it to factor a number exponentially faster than the best-known classical algorithms, and then we can use it to break RSA, based on presumed security that factoring is a problem hard to solve on a classical computer. This new technology can be directly applied to many areas, e.g., politics, national defense, economy and daily life. Based on these, we set up this course. In this course, we mainly introduce the basic principles, the current research status of several solid-state quantum coherent devices which are hopeful to be quantum bit. We also introduce how to use these qubit devices to implement quantum computation.

Quantum Information Process and its Implementation with Superconducting devices (00260061)

Instructor: Chen Wei

Classical information-process technology based on semiconductor integrated circuits has brought us technology revolution in the last few decades and greatly improved our quality of life. It has now faced with un-surmountable technological barriers and is very hard to continue to improve along the present route. A new type information process technology based on quantum mechanics could improve the efficiency of information process and solve some problems unsolvable by classical information process technology. The successful implementation of quantum information process will give us quantum communication technology capable of absolute security and high-power quantum computers. This course will introduce the basic principles of quantum information process and basic characteristics of superconductor. We will study the implementing methods of quantum information process using superconducting devices. Through literature survey and group discussion we will learn the latest progress, problems encountered and investigate possible solutions for superconducting implementation of quantum information process.

Batteries and Power MEMS (10260031)

Instructor: Wang Xiaohong

How much space is occupied by battery in a cell phone? Is that possible the “super graphene lithium battery” been fully charged within 10 minutes and supports more than 450 km mileage for vehicles? Graphene battery should be categorized as a battery or a capacitor? Can cells function as electricity generator? Exploring the clean renewable energy resources is one of the most imperative tasks for the sustainable development of the human civilization. Besides the macroscopic energy resource problems, urgent demands for independent, enduring and maintenance-free micro/nano energy technologies are proposed in a smaller scale. With the advancement of 5g communication, AI, big data and other emerging technologies, Internet of things (IOTs) has become the fundamental technology for smart home, smart wearable equipment, VR game, smart community, intelligent transportation network, etc. These continuously miniaturized IOTs also greatly promote the development of micro/nano energy technology. Based on micro/nano fabrication technologies and new materials, the course will introduce from the birth of lithium battery to the frontier research in the field of PowerMEMS. Through lectures, literature reviews, reading reports, organized discussions and summaries, students will learn different kinds of micro/nano energy devices, including the physics/chemistry concepts, design, fabrication and related applications. In addition, the skills of reading, thinking, presentation and writing of scientific paper will be well trained.

From Smart Sensing to Internet of Things (10260042)

Instructor: Wang Zheyao

Applications of Nanotechnology in Real Life (10260011)

Instructor: Tian He

Nanotechnology has penetrated into all aspects of our lives and profoundly changed our lives. Many applications already used nanotechnology. This course uses multimedia methods such as pictures and videos to tell students with different professional backgrounds about the application of nanotechnology in real life.

From Abacus to Quantum Computer (10260062)

Instructor: Li Tiefu

The main content of the course includes mechanical computing, integrated circuit technology, quantum computing, micro-nano manufacturing. It adopts a combination of teaching, self-study, practice and discussion, according to the development process of information technology. It lets everyone design experiments, use Lego bricks to build mechanical computers, and use integrated circuits to build electronic computers and participate in the use of quantum computers in a research lab to experience the future, to get a understanding of the huge differences between different levels of physical systems used as information technology. Through the study of the course, students will understand the basic knowledge of physics, electronics, microelectronics and other aspects involved in information processing technology. It will stimulate students to think about the future development of their major, and exercise the combination of general knowledge and professional knowledge to solve practical problems. It will also improve the ability of literature reading, quick acquisition of knowledge, and teamwork ability.

Smart Sensing in Social Life (10260022)

Instructor: Wu Xiaoming

This course introduces the application of smart sensors on modern life, including the fields of military, industry, environment, transportation, sports, entertainment, and biomedicine, and so on. In this course, the student will learn the working mechanisms behind various smart sensors, such as motion sensors, temperature sensors, gas sensors, magnetic sensors, image sensors, biochemical sensors, etc. With the development of Internet of Thing (IoT), the knowledge scope of smart sensor involved to integrated circuits, Internet, artificial intelligence, and other related fields.