Zewen Liu Professor

Zewen Liu, Prof. Dr, doctoral supervisor. He got his BS degree University of Science and Technology of China (USTC) in 1983 and got his Ph.D degree from Paris-Sud University (Now the Université Paris-Saclay) in 1997, France. He research experiences include x-ray lithography, LIGA，RF-MEMS, integrated sensor and micro/nanofabrication process. He had published around 200 academic papers in domestic and international academic journals and conferences, and been authorized over 50 patents. He used to be the deputy director of the Institute of Microelectronics and Nanodevices and Systems, Tsinghua University, and the deputy director of the Institute of Microelectronics. He was serviced as Senior member of the China Electronics Society, the senior member of the China Micro Nanotechnology Society, Natural Science Foundation and Natural Science Award Evaluation Expert. He was also serviced as committee member and journal paper reviewers for many international conference and journal and had been awarded titles such as Outstanding Teacher at Tsinghua University and Outstanding Doctoral Supervisor at Tsinghua University. His current research topics are as following:

1. RF and microwave MEMS devices for wireless communication

2. Silicon based solid state nanpore for biosensing

3. MEMS sensors based on GaN and other semiconductor materials

The main courses and lectures he taught to the students include:

Integrated Intelligent Sensors, Principles of Micro/Nano Technology Processing, Applications of Sensors in Modern Social Life